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Vergason Technology, Inc

Lean 710 Convertible Metalizing System

A Versatile New PVD Metalization Platform For Sputtering Or Thermal Evaporation Applications
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Revolutionary Simplicity
Flexible and economical, the LEAN 710 is designed for multiple metalization applications
Lean 710 Convertible Metalizing System

Product Description

The first of its kind, the LEAN 710 is field-convertible, from thermal evaporation to magnetron sputtering, or from magnetron sputtering to thermal evaporation. Now you can have the flexibility in deposition technology with multi-use PVD metalizing systems in a single platform.

Special Features

Multiple matched pumping package options
Large plenum cryotrap, options for cryochiller
Up to 90kW per cathode for sputtering
Ethernet-ready for remote support
Data-logging options
Fixturing and process development support
PLC-controlled process, open-architecture with password protection for customer-controlled program modifications
Deposition technology for multi-use PVD metalizing applications

Benefits

Compact Footprint
Field upgradeable
Lean 710 Convertible Metalizing System
Open-Architecture PLC
Flexibility in deposition technology- Sputtering and/or Thermal evaporation
Streamlined system, economical design
Lean 710 Rendering

Technical Specification

  • Chamber Size: 825mm diameter X 1575mm height
  • Coating Zone: 710mm diameter x 1220mm Height
  • Multiple matched pumping package options
  • Large plenum cryotrap, options for cryochiller
  • Up to 90kW per cathode for sputtering
  • PLC-controlled process, open-architecture with password protection for customer-controlled program modifications
  • Data-logging options
  • Fixturing and process development support
  • Ethernet-ready for remote support

Utility Requirements

Electrical:
400V 50Hz / 480V 60Hz options; 3 Phase
Compressed Air:
6 bar (87psi) minimum; 9.4 liters/second (20cfm) minimum flow
Cooling Water:
16-24 deg C Inlet; 2.75bar (40psi) minimum pressure
114-208 liter/minute (30-55gpm) flow minimum, depending on system configuration

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